A new approach is presented to fabricate an adhesion-controlled surface by means of local anodic oxide (LAO) lithography combined with ion exchange of ionic liquid. In this research, the nanometer-sized textures are first fabricated using a conductive atomic force microscopy based local anodic oxide method. Ionic liquid molecules were then self-assembled onto the matrix layer of silicon dioxide texture. The adhesive force of the surface was controlled by the formation of a self-assembled monolayer modified texture and ion exchange on the surface. Furthermore, adhesive characterization of ionic liquid and texture layers was investigated with a colloidal probe method. This approach can be readily extended to other conductive substrates, which have potential applications in the fields of detecting or sensing.